Dielectric materials are of critical importance in the function of microelectronic devices. This article outlines why and the mechanical characterization of Ultra Low-k Dielectric Films.
Development of porous silica ultra low-k films for 32 nm-node interconnects and beyond
Understanding Ultra Low-k Dielectric Films
Dielectric - Wikipedia
Thermally conductive ultra-low-k dielectric layers based on two-dimensional covalent organic frameworks
Bruker Nano Surfaces and Metrology : Quotes, Address, Contact
Understanding Capacitor Types and Characteristics
Low-k dielectric materials - ScienceDirect
Mechanical Characterization Of Ultra Low-k Dielectric Films
Bruker : Quotes, Address, Contact
Porous Low-Dielectric-Constant Material for Semiconductor Microelectronics
Understanding Chip Capacitors - Johanson Technology
Dielectric Thin Films
Depth Profile Characterization, SIMS
Breaking The 2nm Barrier
