Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

PDF) Stability of SiNx Prepared by Plasma-Enhanced Chemical Vapor Deposition at Low Temperature

Table 1 from Gas permeation in silicon-oxide / polymer ( SiO x / PET ) barrier films : role of the oxide lattice , nano-defects and macro-defects

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Nanomaterials, Free Full-Text

Table 4 from Optimization of plasma-enhanced chemical vapor deposition silicon oxynitride layers for integrated optics applications

PDF) Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature

Classification of the Categories of Amorphous Hydrogenated Silicon Oxynitride Films Using Infrared Spectroscopy

Micromachines, Free Full-Text

Silicon oxynitride thin films by plasma-enhanced atomic layer deposition using a hydrogen-free metal-organic silicon precursor and N2 plasma - ScienceDirect

Silicone encapsulation of thin-film SiOx, SiOxNyand SiC for modern electronic medical implants: a comparative long-term ageing study. - Abstract - Europe PMC

Table 4 from Optimization of plasma-enhanced chemical vapor deposition silicon oxynitride layers for integrated optics applications

Nanomaterials, Free Full-Text

PDF) Degradation by water vapor of hydrogenated amorphous silicon oxynitride films grown at low temperature