Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

Master Mold - an overview

PDF) Nanoimprint Lithography

Continuous roller nanoimprinting: next generation lithography - Nanoscale (RSC Publishing) DOI:10.1039/D2NR06380H

Polymers in conventional and alternative lithography for the fabrication of nanostructures - ScienceDirect

Polymers, Free Full-Text

PDF) Nanoimprint Lithography

Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

a) Fabrication procedure of the PDMS soft mold from the Si master (A)

Continuous roller nanoimprinting: next generation lithography - Nanoscale (RSC Publishing) DOI:10.1039/D2NR06380H